Point-Of-Use Waste Gas Treatment by DAS

Since 1991 DAS Environmental Expert has developed and produced client-specific point-of-use facilities for waste gas treatment. Looking back shows: DAS scrubbers have always corresponded with the market‘s drive for innovation and our client‘s needs for further developments.

For waste gas abatement we offer burn/wet systems from the product lines ESCAPE, STYRAX , UPTIMUM and GIANT as well as wet scrubber systems from the AQUABATE- and SALIX -lines. LARCH is the efficient abatement solution for waste gases from MOCVD processes. Highly particle contaminated waste gases can be abated with the dust-collecting and electrostatic condensate separating systems EDC or JUNIPER.

  • Point-of-Use waste gas treatment in the Chip industry by DAS Environmental Expert
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  • Point-of-Use waste gas treatment systems by DAS for the photovoltaics industry
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  • DAS solutions for the waste gas treatment in the semiconductor industry
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DAS waste gas scrubbers have been proven for more than 20 years in the global semiconductor industry and meet the highest standards of quality, safety and the demanding requirements of the German air pollution law (TA Luft). Based on these core competencies we develop and produce point-of-use scrubbers for waste gas flows from 1 m³/h to 3600 m³/h for a wide variety of industries. In principle, DAS scrubbers treat condensable, flammable, corrosive, reactive, toxic and/or pyrophoric gases (e. g. silanes, silane organics, terpineols, hydrogen, ammonia or hydrogen halides) and fine dust.

Your Application, our Solution for Waste Gas Treatment


  • The efficient treatment of large amounts of waste gas from wet bench applications is no problem with our point-of-use wet scrubber SALIX.

    Wet Scrubber SALIX
    Waste Gas Treatment with SALIX
    Waste Gas Treatment with SALIX
  • The AQUABATE scrubber family consits of 4 wet scrubber systems abating water-soluble harmful substances from process waste gases.

    Wet Scrubber AQUABATE.
    Waste Gas Treatment with AQUABATE
    Waste Gas Treatment with AQUABATE
  • ESCAPE stands for “Environmentally Safe Cleaning and Protecting Equipment” and is the basic product of the burn/wet scrubber families by DAS.

    Waste Gas Treatment with ESCAPE.
    Waste Gas Treatment with ESCAPE
    Waste Gas Treatment with ESCAPE
  • One of our latest product developments basing on the burn/wet-technology is the STYRAX product line, specifically designed for demanding CVD processes.

    Waste Gas Treatment with STYRAX.
    Waste Gas Treatment with STYRAX
    Waste Gas Treatment with STYRAX
  • The product name UPTIMUM refers to the term „Uptime“ underlining the high tool availability. UPTIMUM is a burn/wet scrubber for waste gas treatment.

    Waste Gas Treatment with UPTIMUM.
    Waste Gas Treatment with UPTIMUM
    Waste Gas Treatment with UPTIMUM
  • GIANT is especially qualified to treat waste gases from CVD processes appearing in the PV- and FPD-Industry. GIANT is capable of treating very high waste gas flows.

    Waste Gas Treatment with GIANT.
    Waste Gas Treatment with GIANT
    Waste Gas Treatment with GIANT
  • EDC is an electrostatic dust collector for treatment of particle-containing or aerosol-containing process waste gases. The separator reduces fine dust emissions.

    Waste Gas Treatment with EDC.
    Waste Gas Treatment with EDC
    Waste Gas Treatment with EDC
  • The electrostatic condensate separator JUNIPER reliably and cost-effectively removes condensable organic compounds. Separation rates are above 90 %.

    Waste Gas Treatment with JUNIPER.
    Waste Gas Treatment with JUNIPER
    Waste Gas Treatment with JUNIPER
  • LARCH is DAS´ latest Point-of-Use waste gas abatement system especially designed for MOCVD-Processes in the LED-Industry.It is capable of treating large flows of hydrogen and ammonia.

    Waste Gas Treatment with LARCH.
    Waste Gas Treatment with LARCH
    Waste Gas Treatment with LARCH
You cannot find your industry or process? Maybe you are not sure which system is the right one for you? We would like to discuss potential support with you directly. Please use the following contact form or give us a call. Phone.: +49 351 40494 400
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+49 351 40494-400Give us a call! We are looking forward to providing further information on our products for waste gas treatment.