UPTIMUM is a process waste gas abatement-system using burn/wet technology. Unlike the ESCAPE technology, the gases are burnt from top to bottom. UPTIMUM safely and efficiently treats up to 500 slm of waste gases from CVD processes, which are fed into the combined burner-scrubber system via a maximum of six separate waste gas inlets. A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. High uptime, abatement efficiency, low maintenance, small footprint, low cost of ownership and network compatibility characterize the system, which runs on diverse fuel gases and scrubber liquids.