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STYRAX (burn/wet)

STYRAX INLINE - Waste Gas Treatment burn/wetClick to enlarge image
STYRAX INLINE

STYRAX is the latest DAS tool for process waste gas abatement using burn/wet technology. Like the well-established GIANT and UPTIMUM technology, the gases are burnt from top to bottom. STYRAX safely and efficiently treats up to 300 slm of waste gases from demanding CVD processes, which are fed into the combined burner-scrubber system via several separate waste gas inlets. A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column next to the reactor, soluble components are absorbed and particles suspended. An especially high uptime, abatement efficiency, low maintenance, small footprint, low cost of ownership and network compatibility characterize the system, which runs on diverse fuel gases and scrubber liquids. 

Features

  • Optimized for demanding CVD processes
  • Especially low maintenance - high uptime
  • No inlet clogging
  • Low pressure drop
  • Small footprint
  • Low exhaust gas temperature

Technical Data

  • Dimensions (W x D x H):
    1110 mm x 675 mm x 2070 mm
    Access to maintenance area on front
    and back side
  • Gas flow: max. 18 m3/h
  • Gas entry: up to 6 x DN25 or 4 x DN40
  • Gas outlet: DN100
  • Fuel gas: CH4, LPG (LNG, CNG)/
    Oxydant O2, CDA 
     
  • Communication with process tool possible
  • Can be connected to monitoring system

STYRAX DUO - Waste Gas Treatment burn/wetClick to enlarge image
STYRAX DUO

STYRAX DUO

STYRAX DUO is a double-reactor offering two scrubbing systems that can operate simultaneously. It treats waste gas flows of up to 300 slm, induced through a maximum of two separate inlets per reactor. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases, which ensures the equipment’s near 100 % opertationtime. STYRAX DUO runs with different fuel gases and scrubber liquids.

Technical Data

  • Dimensions (W x D x H):
    1865 mm x 675 mm x 2070 mm
    Access to maintenance area on front and back side
  • Gas flow:    max. 18 m3/h
  • Gas entry:  up to 2 x 2 DN25 or DN40
  • Gas outlet: 2 x DN100
  • Fuel gas CH4, LPG (LNG, CNG)/Oxydant O2, CDA   
  • Communication with process tool possible
  • Can be connected to monitoring system

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