- SPRUCE INLINE
The SPRUCE product family is an extension of DAS waste gas treatment systems and is specifically designed for the waste gas management of CVD processes in the semiconductor industry. SPRUCE systems operate without fuel and are characterized by low investment and low cost of ownership as well as high availability. The access for operation and maintenance from the front and back allows additional space-saving arrangements.
Operating Principle
The process waste gases are introduced a reactor that is heated electrically. The heat breaks down the waste gases and, depending on the chemical composition of the waste gases and the oxidant, various reactions take place. In the subsequent scrubbing stage, gaseous and solid compounds generated by this process are absorbed and cooled down by a suitable scrubbing liquid.
SPRUCE INLINE
SPRUCE INLINE efficiently treats process waste gas that is supplied via up to four separate waste gas inlets.
Technical Data
Dimensions (W x D x H):
1000 mm x 1000 mm x 2000 mm
Access to maintenance area on front
and back side
Gas flow: max. 15 m3/h
Gas entry: up to 4 x DN25
Gas outlet: DN100
- SPRUCE DUO
SPRUCE DUO
SPRUCE DUO is a double-reactor offering two scrubbing systems that can operate simultaneously. It treats waste gas flows, introduced through a maximum of two separate inlets per reactor. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases, which ensures the equipment’s near 100 % operation time.
Technical Data
Dimensions (W x D x H):
1880 mm x 1000 mm x 2000 mm
Access to maintenance area on front and back side
Gas flow:max. 15 m3/h
Gas entry: up to 2 x 2 x DN25
Gas outlet: 2 x DN100
