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GIANT (burn/wet)

GIANT - Waste Gas Treatment for TFT processesClick to enlarge image
GIANT

GIANT is a process waste gas abatement-system using burn/wet technology to safely and efficiently abate up to 2000 slm of waste gas flows from CVD processes. The system features a maximum of six separate waste gas inlets. A fluid wall/film prevents corrosion and deposition of particles in the reactor. In the washing column located next to the reactor, soluble components are absorbed and particles suspended. High uptime, abatement efficiency, low maintenance and network compatibility characterize the system, which runs on diverse fuel gases and scrubber liquids. 

Advantages

  • Efficient treatment of combustible gas, acid and particles combined in one compact system
  • Up to 6 separate gas inlets
  • Cool exhaust gas 
  • All solid particles suspended in liquid (no dry dust handling)
  • Reduced exhaust size/flow requirements
  • High safety standards 
  • Process-Tool Interfaces

Technical Data

  • Dimensions (D x W x H): 
    2025 mm × 1530 mm × 2100 mm
    Access to maintenance area on front and left side
  • Gas entry: max. 6 x DN25 or DN40
  • Gas outlet: DN100
  • Gas flow: max. 120 m3/h 

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