- ESCAPE - Waste Gas Treatment
The ESCAPE technology offers an optimum combination of the two operating principles burning & scrubbing in the smallest possible space. It is an effective and highly versatile technology for waste gas abatement with a low cost of ownership. Based on this technology we have developed the ESCAPE product line, which offers flexible and customized applications for the abatement of almost all process waste gases in the semiconductor industry. Both heights and media supply are variable. All ESCAPE systems have a small footprint with service and maintenance access from front and back. Installation is quick and easy and does not require special tools.
Operating Principle
Hazardous substances of process waste gases are abated directly from where they originate (Point-of-Use, POI). Waste gases are fed into a ring-shaped burner apparatus where thermolysis sets in. Depending on the chemical composition of the waste gases, various reactions take place (oxidation, reduction, pyrolysis). In the subsequent scrubbing process, gaseous and solid compounds generated by combustion are absorbed and cooled down by a suitable scrubbing liquid.
- ESCAPE INLINE
ESCAPE INLINE
ESCAPE INLINE® is our tried and tested basic system for the semiconductor and photovoltaic industries. It abates gas flows of up to 300 slm from various processes, induced through a maximum of four independent inlets. The system combines numerous advantages including high abatement efficiency, low cost of ownership, a small footprint and network compatibility for optimized operating costs. As an alternative to the scrubber liquid’s through-feed-system the reactor can be equipped with a water-conserving closed-loop design. The reactors are available in two sizes, and runs with all fuel gases and scrubber liquids.
Features
- Up to 4 independent inlets
- Runs with different fuel gases
- Low water consumption through closed-loop design
- Available in 2 sizes
- SEMI S2 compliant
Technical Data
- Dimensions (W x D x H):
855 mm x 675 mm x 1800/2070 mm
Access to maintenance area on front and
back side - Gas entry: max. 4 x DN25 or DN40
- Gas outlet: DN100
- Gas flow: max. 18 m3/h
- ESCAPE DUO
ESCAPE DUO
ESCAPE DUO is a double-reactor offering two scrubbing systems that can operate simultaneously. It treats waste gas flows of up to 300 slm, introduced through a maximum of two separate inlets per reactor. In case of malfunction or maintenance on one reactor, the other backs up the treatment of all waste gases, which ensures the equipment’s near 100 % opertationtime. As an alternative to the scrubber liquid through-feed-system the reactor can be equipped with a water-conserving closed-loop design. ESCAPE DUO is available in two sizes and runs with all fuel gases and scrubber liquids.
Features
- Up to 2 independent waste gas and backup lines per reactor
- Near 100 % operation time through backup function
- Second reactor allows uninterrupted operation during maintenance
- Runs with different fuel gases
- Low water consumption through closed-loop design
- Available in two sizes
- SEMI S2 compliant
Technical Data
- Dimensions (W x D x H):
1650 mm x 675 mm x 1800/2070 mm
Access to maintenance area on front and
back side - Gas entry: max. 2 x 2 DN25 or DN40
- Gas outlet: max. 2 x DN100
- Gas flow: max. 18 m3/h
- ESCAPE TWIN
ESCAPE TWIN
ESCAPE TWIN® is a system with one main and one back-up reactor. The main reactor can treat gas flows of up to 300 slm, induced through a maximum of four separate inlets. In case of malfunction or maintenance of the main reactor the back-up reactor takes over the waste gas treatment, which ensures the equipment’s near 100 % operation time. As an alternative to the scrubber liquid through-feed-system the reactor can be equipped with a water-conserving closed-loop design. ESCAPE TWIN® is available in two sizes and runs with all fuel gases and scrubber liquids.
Features
- Main reactor with up to 4 independent inlets
- Near 100 % operation time through back-up function
- Back-up reactor allows uninterrupted operation during maintenance
- Runs with different fuel gases
- Low water consumption through closed-loop design
- SEMI S2 compliant
Technical Data
- Dimensions (W x D x H):
1650 mm x 675 mm x 1800/2070 mm
Access to maintenance area on front and
back side - Gas entry: max. 4 x DN25 or DN40
- Gas outlet: max. 2 x DN100
- Gas flow: max. 18 m3/h
- ESCAPE TWICE
ESCAPE TWICE
ESCAPE TWICE is a complete double system within one cabinet with a single control unit. The double system treats waste gas flows of up to 300 slm induced through a maximum of four separate inlets per reactor. In principle, this ESCAPE version is available in the same versions as ESCAPE INLINE®.
Features
- up to 4 independent inlets per reactor
- Runs with different fuel gases
- Low water consumption through closed-loop design
- SEMI S2 compliant
Technical Data
- Dimensions (W x D x H):
1650 mm x 675 mm x 2070 mm
Access to maintenance area on front and
back side - Gas entry: max. 2 x 4 x DN25 or DN40
- Gas outlet: max. 2 x DN100
- Gas flow: max. 2 x 18 m3/h
