Technology
AQUABATE is a pure wet scrubber technology for efficient abatement of water-soluble harmful substances from process waste gases. Its average abatement efficiency of more than 99 % is based on its optimally metered chemical products. The system is employed mainly in the semiconductor industry, as a Point of Use wet treatment system. Installed closely behind the vacuum pumps, AQUABATE optimally protects the fab’s exhaust gas system from contamination and corrosion.
- AQUABATE EPI
AQUABATE ONE
AQUABATE ONE is designed for abatement of poly etch, metal etch and nitride CVD processes. The system treats up to 300 slm waste gas, introduced through a maximum of three waste gas connections, specifically designed to prevent blockages. Both inlets and feed lines have an optional heating system. For the increasing of the washing efficiency the washing water can be enhanced optionally with chemicals. Despite its small size all components and instruments are easily accessible, maintenance is quick and easy. Operation costs can be optimized with a process tool interface.
Features
- High safety standard
- Up to 3 heated anti-clogging gas inlets
- Automatic bypass valves
- Small footprint
- High water recirculation rate
- Process-Tool Inferface
Technical Data
- Dimensions (B x T x H):
750 mm x 950 mm x 1850 mm
Access to maintenance area on front and
back side
- Gas entry: max. 3 x DN25 oder DN40
- Gas outlet: DN63
- Gasflow: max. 24 m3/h
AQUABATE EPI
AQUABATE EPI was especially developed to handle the gases of Epitaxie processes in the semiconductor industry. The main focus is the compliance with the high security standards which arise from the use of the carrier gas hydrogen within this process. After the scrubbing procedure the hydrogen is controlled diluted on the lower explosion limit (LEL).
AQUABATE EPI treats up to 500 slm waste gases which are supplied up to three separate anti-clogging gas inlets. The scrubber is very service friendly. Other advantages are the high disposal efficiency, low investment cost and a small footprint. For optimization the COO a process tool interface is possible.
Features
- High safety standard
- Advanced safety concept for hydrogen handling
- Up to 3 heated anti-clogging gas inlets
- Small footprint
- Process-Tool Inferface
Technical Data
- Dimensions (B x T x H):
1020 mm x 930 mm x 1800 mm
Access to maintenance area on front and
back side
- Gas entry: max. 3 x DN40
- Gas outlet: DN40
- Gasflow: max. 30 m3/h
